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Laser annealing for semiconductor devices

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References

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    Laser-Solid Interactions and Laser Processing — 1978 (American Institute of Physics, Conference Series 50, 1979).

  2. 2

    Laser & Electron Beam Processing of Electronic Materials (eds Anderson, C.L., Celler, G.K., Rozgonyi, G.A., The Electrochemical Society Inc., 1980).

  3. 3

    Khaibullin, I.B., Shtyrkov, G.K., E.I., Zaripov, M.M., Galjutdinov, M.F. & Bajazitov, R.M. Laser Annealing of Implanted Layers Dep. VINITI N 2061 (1974).

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    Van Vechten, J.A., Tsu, R., Saris, F.W. & Hoonhout, D. Phys. Lett. 74A, 417 (1979).

  5. 5

    Lo, H.W. & Compan, A. Phys. Rev.Lett. 44, 1604 (1980).

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