Letter | Published:

Ultrasonic imaging in scanning electron microscopy

Nature volume 286, pages 691693 (14 August 1980) | Download Citation

Subjects

Abstract

A new type of microscopy is described here which uses a focused, modulated electron beam to generate ultrasonic waves at the front surface of a specimen and a piezoelectric transducer to detect these waves at the rear surface. The transducer output is used to form a scanned, magnified image of the specimen. A unique feature of this technique is that image contrast comes primarily from spatial variations in thermal and elastic properties. Images of integrated circuits have been obtained with 4 µm resolution. In thin film specimens 0.1 µm resolution should be possible.

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Author information

Author notes

    • G. S. Cargill III

    Present address: IBM Thomas J. Watson Research Center, Yorktown Heights, New York, 10598.

Affiliations

  1. Cavendish Laboratory, Madingley Road, Cambridge CB3 0HE, UK

    • G. S. Cargill III

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DOI

https://doi.org/10.1038/286691a0

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