Ion Implantation of Semiconductors.
By G. Carter and W. A. Grant. Pp. viii + 214. (Arnold: London, 1976.) Boards £9.50; paper £5.95.
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Smith, B. Ion implantation. Nature 265, 665 (1977). https://doi.org/10.1038/265665b0
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DOI: https://doi.org/10.1038/265665b0