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Holmes-Siedle, A. Silicon wafers without sawing. Nature 254, 487 (1975). https://doi.org/10.1038/254487a0
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DOI: https://doi.org/10.1038/254487a0
Nature volume 254, page 487 (1975)
Holmes-Siedle, A. Silicon wafers without sawing. Nature 254, 487 (1975). https://doi.org/10.1038/254487a0
Published:
Issue Date:
DOI: https://doi.org/10.1038/254487a0