Uses of Fine Focused Ion Beams with High Current Density

Abstract

WELL defined, focused beams of high energy ions have many applications. A target can be micro-machined by eroding small areas by sputtering¹ and the sputtered fragments can be collected for analysis². In contrast to electron or laser beam machining, there need be no excessive heating of the specimen. If the focused beam is scanned over the surface of the specimen, variations in secondary electron emission can be exploited to simulate a picture similar to that of a scanning electron microscope³, with the difference that some erosion of the specimen occurs during observation.