Letter | Published:

Pyrolytic Deposits of Silicon Carbide

Nature volume 212, page 71 (01 October 1966) | Download Citation

Subjects

Abstract

LAYERS and “whiskers” of silicon carbide have been made in several investigations1 by the thermal decomposition of the vapour of trichloromethylsilane (CH3SiCl3). The experimental conditions used have varied widely, however, and there has been little information about what controls the morphology of the silicon carbide produced by this method. In recent work it has been shown that the form of deposit obtained is determined mainly by the flux of the vapour species. Layers are formed above a critical flux, while filamentary deposits are formed below it.

Access optionsAccess options

Rent or Buy article

Get time limited or full article access on ReadCube.

from$8.99

All prices are NET prices.

References

  1. 1.

    For example, see: , and , in Special Ceramics 1964, edit. by Popper, P., 45 (Academic Press, London and New York, 1965). , and , J. Amer. Ceram. Soc., 46 (6), 299 (1963).

  2. 2.

    , and , Industr. Eng. Chem., 46, 2367 (1954).

Download references

Author information

Affiliations

  1. Houldsworth School of Applied Science, University of Leeds.

    • M. J. NOONE
    •  & J. P. ROBERTS

Authors

  1. Search for M. J. NOONE in:

  2. Search for J. P. ROBERTS in:

About this article

Publication history

Published

DOI

https://doi.org/10.1038/212071a0

Further reading

Comments

By submitting a comment you agree to abide by our Terms and Community Guidelines. If you find something abusive or that does not comply with our terms or guidelines please flag it as inappropriate.