Letter | Published:

Production of Superconducting Niobium Films by Vacuum-Arc Deposition

Nature volume 193, pages 766767 (24 February 1962) | Download Citation

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Abstract

HOLLAND1 commented that certain workers2,3 interested in the production of vacuum-deposited thin films had shown that the electric arc could be used for this purpose. He noted that this method offered a possible solution to the problem of evaporating low-vapour-pressure metals which for various reasons could not be handled by the techniques then available. We have shown that, where films of uniform thickness are not required, the high deposition-rates obtainable from a vacuum-arc at a very short distance from the substrate greatly facilitate the production of pure films in poor vacua.

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References

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    , Nature, 178, 328 (1956).

  2. 2.

    , German Patent No. 915765 (July 29, 1954).

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    , , and , J. Phys. Rad., 16, 811 (1955).

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    , and , Philips Res. Rep., 14, 427 (1959).

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    , , , and , Rev. Sci. Instr., 32, 203 (1961).

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    , , , , Vacuum Symposium Transactions, Eighth Nat. Symp. (Pergamon Press) (in the press).

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Author information

Affiliations

  1. Superconducting Circuits Laboratory, Electrical Engineering Department, Duke University, Durham, North Carolina.

    • M. S. P. LUCAS
    •  & D. T. MEYER

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DOI

https://doi.org/10.1038/193766b0

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