X-Ray Hazard in Sputtering Apparatus

Abstract

IN a paper to be published in the Proceedings of the Physical Society on the “Bombardment of Various Elements by Hg+ and A+ Ions”, we have described sputtering experiments with low-pressure gas discharge tubes where an appreciable intensity of X-radiation was observed. It has been pointed out to us that, whereas the hazards of X-rays in magnetrons1, gas-filled2 and vacuum valves are well known, the indirect production of X-rays during sputtering at high voltages would be generally unsuspected, and that the matter should be given wider mention.

Access optionsAccess options

Rent or Buy article

Get time limited or full article access on ReadCube.

from$8.99

All prices are NET prices.

References

  1. 1

    Dunsmuir, R., Milner, C. J., and Spayne, A. J., Nature, 161, 244 (1948).

  2. 2

    Schneider, S., and Reich, B., Proc. Inst. Rad. Eng., 43, 711 (1955).

Download references

Author information

Rights and permissions

Reprints and Permissions

About this article

Further reading

Comments

By submitting a comment you agree to abide by our Terms and Community Guidelines. If you find something abusive or that does not comply with our terms or guidelines please flag it as inappropriate.