X-Ray Hazard in Sputtering Apparatus


IN a paper to be published in the Proceedings of the Physical Society on the “Bombardment of Various Elements by Hg+ and A+ Ions”, we have described sputtering experiments with low-pressure gas discharge tubes where an appreciable intensity of X-radiation was observed. It has been pointed out to us that, whereas the hazards of X-rays in magnetrons1, gas-filled2 and vacuum valves are well known, the indirect production of X-rays during sputtering at high voltages would be generally unsuspected, and that the matter should be given wider mention.

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  1. 1

    Dunsmuir, R., Milner, C. J., and Spayne, A. J., Nature, 161, 244 (1948).

  2. 2

    Schneider, S., and Reich, B., Proc. Inst. Rad. Eng., 43, 711 (1955).

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