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X-Ray Hazard in Sputtering Apparatus

Abstract

IN a paper to be published in the Proceedings of the Physical Society on the “Bombardment of Various Elements by Hg+ and A+ Ions”, we have described sputtering experiments with low-pressure gas discharge tubes where an appreciable intensity of X-radiation was observed. It has been pointed out to us that, whereas the hazards of X-rays in magnetrons1, gas-filled2 and vacuum valves are well known, the indirect production of X-rays during sputtering at high voltages would be generally unsuspected, and that the matter should be given wider mention.

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References

  1. Dunsmuir, R., Milner, C. J., and Spayne, A. J., Nature, 161, 244 (1948).

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  2. Schneider, S., and Reich, B., Proc. Inst. Rad. Eng., 43, 711 (1955).

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STRACHAN, J., HARRIS, N. X-Ray Hazard in Sputtering Apparatus. Nature 178, 588–589 (1956). https://doi.org/10.1038/178588a0

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