Interferometric Determination of the Apparent Thickness of Thin Metallic Films

Abstract

Khamsavi and Donaldson1 have described an interferometric method for the measurement of the apparent thicknesses of thin metallic films (200–700 A. in thickness). The method described was essentially that due to Wiener2, modified to bring in the advantages of the sharp interference fringes obtained when multiple-beam interferometry is used3. An opaque reflecting layer is deposited over the edge of the film to be measured, and the step in this layer is measured by using it as one surface of an interferometer, and viewing this in reflexion using either fringes of equal thickness or fringes of equal chromatic order. By combining these thickness measurements with colorimetric determinations of the mass deposited upon a given area, they showed that the density of the film appeared to remain constant and equal to that of the bulk metal (silver) down to quite small thicknesses (122 A.).

References

  1. 1

    Khamsavi and Donaldson, Nature, 159, 228 (1947).

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  2. 2

    Wiener, Wied. Ann., 31, 629 (1887).

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  3. 3

    Tolansky, "Applications of Multiple Beam Interferometry" (Oxford Univ. Press, 1948).

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  4. 4

    Thomson, Proc. Phys. Soc., 61, 403 (1948).

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AVERY, D. Interferometric Determination of the Apparent Thickness of Thin Metallic Films. Nature 163, 916 (1949). https://doi.org/10.1038/163916a0

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