Figure 4 - Design flow (not to scale).

a–d, Stages of primary mirror fabrication: ITO coated glass (a), spin-coating of polyimide (b), aluminium sputtering and patterning (c), and dry etch of polyimide (d). e–f, Stages of secondary mirror fabrication: metal sputtering (e), photolithography followed by etching of the metal (f), and final device alignment (g).