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Wafer-scale integration of group IIIV lasers on silicon using transfer printing of epitaxial layers

Abstract

The hard-drive and electronic industries can benefit by using the properties of light for power transfer and signalling. However, the integration of silicon electronics with lasers remains a challenge, because practical monolithic silicon lasers are not currently available. Here, we demonstrate a strategy for this integration, using an elastomeric stamp to selectively release and transfer epitaxial coupons of GaAs to realize IIIV lasers on a silicon substrate by means of a wafer-scale printing process. Low-threshold continuous-wave lasing at a wavelength of 824 nm is achieved from Fabry–Pérot ridge waveguide lasers operating at temperatures up to 100 °C. Single and multi-transverse mode devices emit total optical powers of >60 mW and support modulation bandwidths of >3 GHz. This fabrication strategy opens a route to the low-cost integration of IIIV photonic devices and circuits on silicon and other substrates.

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Figure 1: Schematic overview of the integration process with images of fabricated devices.
Figure 2: Characteristics of lasers fabricated on silicon.
Figure 3: Interface characteristics and laser diode thermal response.
Figure 4: Schematic and characteristics of the integrated waveguide.

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References

  1. Challener, W. A. et al. Heat-assisted magnetic recording by a near-field transducer with efficient optical energy transfer. Nature Photon. 3, 220–224 (2009).

    Article  ADS  Google Scholar 

  2. Stipe, B. C. et al. Magnetic recording at 1.5 Pb m−2 using an integrated plasmonic antenna. Nature Photon. 4, 484–488 (2010).

    Article  ADS  Google Scholar 

  3. Jalali, B. & Fathpour, S. Silicon photonics. J. Lightwave Technol. 24, 4600–4615 (2006).

    Article  ADS  Google Scholar 

  4. Liang, D. & Bowers, J. E. Recent progress in lasers on silicon. Nature Photon. 4, 511–517 (2010).

    Article  ADS  Google Scholar 

  5. Pavesi, L. et al. Optical gain in silicon nanocrystals. Nature 408, 440–444 (2000).

    Article  ADS  Google Scholar 

  6. Groenert, M. E. et al. Monolithic integration of room-temperature cw GaAs/AlGaAs lasers on Si substrates via relaxed graded GeSi buffer layers. J. Appl. Phys. 93, 362–367 (2003).

    Article  ADS  Google Scholar 

  7. Liebich, S. et al. Laser operation of Ga(NAsP) lattice-matched to (001) silicon substrate. Appl. Phys. Lett. 99, 071109 (2011).

    Article  ADS  Google Scholar 

  8. Liu, H. et al. Long-wavelength InAs/GaAs quantum-dot laser diode monolithically grown on Ge substrate. Nature Photon. 5, 416–419 (2011).

    Article  ADS  Google Scholar 

  9. Wang, Z. et al. A monolithic integration platform for silicon photonics. Proc. Int. Conf. Inform. Photon. 18–20 (2011).

  10. Palit, S. et al. Top–bottom stripe thin film InGaAs/GaAsP laser integrated on silicon. Proc. Dev. Res. Conf. 137–138 (2008).

  11. Rumpler, J. J. & Fonstad, C. J. Continuous-wave electrically pumped 1.55-μm edge-emitting platelet ridge laser diodes on silicon. IEEE Photon. Tech. Lett. 21, 827–829 (2009).

    Article  ADS  Google Scholar 

  12. Fang, A. W. et al. Electrically pumped hybrid AlGaInAs–silicon evanescent laser. Opt. Express 14, 9203–9210 (2006).

    Article  ADS  Google Scholar 

  13. Van Campenhout, J. et al. Electrically pumped InP-based microdisk lasers integrated with a nanophotonic silicon-on-insulator waveguide circuit. Opt. Express 15, 6744–6749 (2007).

    Article  ADS  Google Scholar 

  14. Kopp, C. et al. Silicon photonic circuits: on-CMOS integration, fiber optical coupling, and packaging. IEEE J. Sel. Top. Quantum Electron. 17, 498–509 (2011).

    Article  ADS  Google Scholar 

  15. Kim, R.-H. et al. Waterproof AlInGaP optoelectronics on stretchable substrates with applications in biomedicine and robotics. Nature Mater. 9, 929–937 (2010).

    Article  ADS  Google Scholar 

  16. Bower, C. A. et al. Transfer-printed microscale integrated circuits for high performance display backplanes. IEEE Trans. Compon. Packag. Manuf. Technol. 99, 1916–1922 (2011).

    Article  Google Scholar 

  17. Yang, Y. et al. Arrays of silicon micro/nanostructures formed in suspended configurations for deterministic assembly using flat and roller-type stamps. Small 7, 484–491 (2011).

    Article  Google Scholar 

  18. Menard, E. et al. Micro and nanopatterning techniques for organic electronic and optoelectronic systems. Chem. Rev. 107, 1117–1160 (2007).

    Article  Google Scholar 

  19. Meitl, M. A. et al. Transfer printing by kinetic control of adhesion to an elastomeric stamp. Nature Mater. 5, 33–38 (2006).

    Article  ADS  Google Scholar 

  20. Carlson, A. et al. Shear-enhanced adhesiveless transfer printing for use in deterministic materials assembly. Appl. Phys. Lett. 98, 264104 (2011).

    Article  ADS  Google Scholar 

Download references

Acknowledgements

This work was carried out within the Competence Centre for Applied Nanotechnology, funded by Enterprise Ireland & IDA Ireland, using equipment and facilities provided by PRTLI, and with support from the EU-IAPP programme (grant no. 286285, COMPASS). The authors thank B. Roycroft for assistance with bandwidth measurement.

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Contributions

M.B.M, M.A.G. and B.C. developed the integration strategy for lasers on non-native substrates. B.C. designed the laser and the laser fabrication strategy. C.B. and M.M. designed and developed the epitaxial transfer process. J.J. developed and characterized the lasers and integrated waveguides. B.C., J.J. and C.B. wrote the manuscript. All authors edited the manuscript.

Corresponding authors

Correspondence to John Justice or Brian Corbett.

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The authors declare no competing financial interests.

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Justice, J., Bower, C., Meitl, M. et al. Wafer-scale integration of group IIIV lasers on silicon using transfer printing of epitaxial layers. Nature Photon 6, 610–614 (2012). https://doi.org/10.1038/nphoton.2012.204

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