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Nature Photonics 2, 273–274 (1 May 2008) | doi:10.1038/nphoton.2008.61
Microscopy: Polarized high-resolution imaging
Abstract
The spatial resolution of a microscope is a key performance criterion in many scientific and industrial applications. At present, only the most advanced electron and scanning-probe microscopes can resolve the atomic-scale features of modern integrated circuits.
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