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News and Views
Nature Photonics 2, 273 - 274 (2008)
doi:10.1038/nphoton.2008.61
Microscopy: Polarized high-resolution imaging
Stephen Ippolito1
- Stephen Ippolito is at the Semiconductor Research & Development Center and the T. J. Watson Research Center at IBM, 1101 Kitchawan Road, Yorktown Heights, New York 10598, USA.
e-mail: sbippoli@us.ibm.com
Abstract
By making use of polarization control, researchers have achieved a record 100-nm resolution when imaging buried transistors in an integrated circuit.
The spatial resolution of a microscope is a key performance criterion in many scientific and industrial applications. At present, only the most advanced electron and scanning-probe microscopes can resolve the atomic-scale features of modern integrated circuits.
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