News and Views

Nature Photonics 2, 273 - 274 (2008)
doi:10.1038/nphoton.2008.61

Microscopy: Polarized high-resolution imaging

Stephen Ippolito1

  1. Stephen Ippolito is at the Semiconductor Research & Development Center and the T. J. Watson Research Center at IBM, 1101 Kitchawan Road, Yorktown Heights, New York 10598, USA.
    e-mail: sbippoli@us.ibm.com

By making use of polarization control, researchers have achieved a record 100-nm resolution when imaging buried transistors in an integrated circuit.

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