1. Stephen Ippolito is at the Semiconductor Research & Development Center and the T. J. Watson Research Center at IBM, 1101 Kitchawan Road, Yorktown Heights, New York 10598, USA.
   e-mail: sbippoli@us.ibm.com

Abstract

By making use of polarization control, researchers have achieved a record 100-nm resolution when imaging buried transistors in an integrated circuit.

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