A single-atom transistor has been made by positioning a phosphorus atom between metallic electrodes, also made of phosphorus, on a silicon surface.
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Lansbergen, G. Transistors arrive at the atomic limit. Nature Nanotech 7, 209–210 (2012). https://doi.org/10.1038/nnano.2012.23
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DOI: https://doi.org/10.1038/nnano.2012.23
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