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Nature Nanotechnology 3, 381 - 382 (2008)
doi:10.1038/nnano.2008.195
Subject Categories: Electronic properties and devices | Nanometrology and instrumentation
Nanoelectronics: The strain of it all
Abbas Ourmazd1
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Abbas Ourmazd is in the Department of Physics, University of Wisconsin Milwaukee, Wisconsin 53211, USA.
e-mail: ourmazd@uwm.edu
Abstract
Electron interferometry can be used to measure strain with nanoscale resolution in electronic devices by exploiting a simple idea found in physics textbooks.
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