Letter abstract
Nature Nanotechnology 3, 88 - 92 (2008)
Published online: 13 January 2008 | doi:10.1038/nnano.2008.26
Bottom-up assembly of large-area nanowire resonator arrays
Mingwei Li1,5, Rustom B. Bhiladvala1,2,5, Thomas J. Morrow3, James A. Sioss3, Kok-Keong Lew4,6, Joan M. Redwing4, Christine D. Keating3 & Theresa S. Mayer1,2
Abstract
Directed-assembly of nanowire-based devices1 will enable the development of integrated circuits with new functions that extend well beyond mainstream digital logic. For example, nanoelectromechanical resonators are very attractive for chip-based sensor arrays2 because of their potential for ultrasensitive mass detection3, 4, 5, 6. In this letter, we introduce a new bottom-up assembly method to fabricate large-area nanoelectromechanical arrays each having over 2,000 single-nanowire resonators. The nanowires are synthesized and chemically functionalized before they are integrated onto a silicon chip at predetermined locations. Peptide nucleic acid probe molecules attached to the nanowires before assembly maintain their binding selectivity and recognize complementary oligonucleotide targets once the resonator array is assembled. The two types of cantilevered resonators we integrated here using silicon and rhodium nanowires had Q-factors of 
4,500 and 1,150, respectively, in vacuum. Taken together, these results show that bottom-up nanowire assembly can offer a practical alternative to top-down fabrication for sensitive chip-based detection.
- Department of Electrical Engineering, The Pennsylvania State University, University Park, Pennsylvania 16802, USA
- Materials Research Institute, The Pennsylvania State University, University Park, Pennsylvania 16802, USA
- Department of Chemistry, The Pennsylvania State University, University Park, Pennsylvania 16802, USA
- Department of Materials Science and Engineering, The Pennsylvania State University, University Park, Pennsylvania 16802, USA
- These authors contributed equally to this work.
- Present address: Power Electronics Branch, Naval Research Laboratory, Washington DC 22375, USA
Correspondence to: Rustom B. Bhiladvala1,2,5 e-mail: rbb16@psu.edu
Correspondence to: Theresa S. Mayer1,2 e-mail: tsm2@psu.edu
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