Letter abstract


Nature Nanotechnology 3, 603 - 608 (2008)
Published online: 14 September 2008 | doi:10.1038/nnano.2008.267

Subject Categories: Electronic properties and devices | Nanoparticles | Synthesis and processing

CMOS-compatible fabrication of room-temperature single-electron devices

Vishva Ray1, Ramkumar Subramanian1, Pradeep Bhadrachalam1, Liang-Chieh Ma1, Choong-Un Kim1 & Seong Jin Koh1


Devices in which the transport and storage of single electrons are systematically controlled could lead to a new generation of nanoscale devices and sensors1, 2, 3. The attractive features of these devices include operation at extremely low power, scalability to the sub-nanometre regime and extremely high charge sensitivity4, 5, 6, 7, 8, 9. However, the fabrication of single-electron devices requires nanoscale geometrical control, which has limited their fabrication to small numbers of devices at a time9, 10, 11, 12, 13, 14, 15, significantly restricting their implementation in practical devices. Here we report the parallel fabrication of single-electron devices, which results in multiple, individually addressable, single-electron devices that operate at room temperature. This was made possible using CMOS fabrication technology and implementing self-alignment of the source and drain electrodes, which are vertically separated by thin dielectric films. We demonstrate clear Coulomb staircase/blockade and Coulomb oscillations at room temperature and also at low temperatures.

Top
  1. Department of Materials Science and Engineering, The University of Texas at Arlington, Arlington, Texas 76019, USA

Correspondence to: Seong Jin Koh1 e-mail: skoh@uta.edu



MORE ARTICLES LIKE THIS

These links to content published by NPG are automatically generated.

NEWS AND VIEWS

Materials science A ?bed of nails? on silicon

Nature News and Views (25 Nov 2004)

Biomolecular templates Nanoparticles align

Nature Materials News and Views (01 Apr 2003)

See all 6 matches for News And Views

Extra navigation

Subscribe to Nature Nanotechnology

Subscribe

Open Innovation Challenges

naturejobs

natureproducts


ADVERTISEMENT