Letter abstract

Nature Nanotechnology 2, 290 - 294 (2007)
Published online: 29 April 2007 | doi:10.1038/nnano.2007.109

Creation of multiple nanodots by single ions

Ender Akcöltekin1, Thorsten Peters1, Ralf Meyer1, Andreas Duvenbeck1, Miriam Klusmann1, Isabelle Monnet2, Henning Lebius2 & Marika Schleberger1

In the search to develop tools that are able to modify surfaces on the nanometre scale, the use of heavy ions with energies of several tens of MeV is becoming more attractive. Low-energy ions are mostly stopped by nuclei, which causes the energy to be dissipated over a large volume. In the high-energy regime, however, the ions are stopped by electronic excitations1, 2, 3, and the extremely local (approx10 nm3) nature of the energy deposition leads to the creation of nanosized 'hillocks' or nanodots under normal incidence4, 5, 6. Usually, each nanodot results from the impact of a single ion, and the dots are randomly distributed. Here we demonstrate that multiple, equally spaced dots, each separated by a few tens of nanometres, can be created if a single high-energy xenon ion strikes the surface at a grazing angle. By varying this angle, the number of dots, as well as their spacing, can be controlled.

  1. Universität Duisburg-Essen, FB Physik, 47048 Duisburg, Germany
  2. CIRIL (CEA, CNRS, ENSICAEN), 14070 Caen Cedex 5, France

Correspondence to: Marika Schleberger1 e-mail: marika.schleberger@uni-due.de


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