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Letter

Nature Materials 4, 47–50 (1 January 2005) | doi:10.1038/nmat1282

Shaped silicon-crystal wafers obtained by plastic deformation and their application to silicon-crystal lenses

Kazuo Nakajima , Kozo Fujiwara , Wugen Pan & Hiroshi Okuda

Plastic deformation is an unlikely process by which to mould pristine silicon wafers into three-dimensional shapes owing to the inevitable detrimental impact that the resulting mechanically induced defects would have on their electrical properties. However, if one were to find a way of doing so without substantial degradation of these properties, a range of new applications might be opened up. Here we report on the successful plastic deformation of silicon crystal wafers for the preparation of wafers with various shapes.