Access
To read this article in full you may need to log in, make a payment or gain access through a site license (see right).
Letter
Nature Materials 2, 528–531 (1 August 2003) | doi:10.1038/nmat943
Thermoelectric microdevice fabricated by a MEMS-like electrochemical process
&
Abstract
Microelectromechanical systems (MEMS) are the basis of many rapidly growing technologies, because they combine miniature sensors and actuators with communications and electronics at low cost. Commercial MEMS fabrication processes are limited to silicon-based materials or two-dimensional structures.
To read this article in full you may need to log in, make a payment or gain access through a site license (see right).
