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From the following article:

Soft X-ray microscopy at a spatial resolution better than 15 nm

Weilun Chao, Bruce D. Harteneck, J. Alexander Liddle, Erik H. Anderson & David T. Attwood

Nature 435, 1210-1213(30 June 2005)

doi:10.1038/nature03719

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Figure 1 - Unfortunately we are unable to provide accessible alternative text for this. If you require assistance to access this image, or to obtain a text description, please contact npg@nature.com

Figure 1

A diagram of the soft X-ray microscope XM-1.

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Figure 2

An illustration of the overlay nanofabrication technique for micro zone plate fabrication.

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Figure 3

Scanning electron micrograph of a zone plate with 15 nm outermost zone.

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Figure 4

Soft X-ray images of 15.1 nm and 19.5 nm half-period test objects, as formed with zone plates having outer zone widths of 25 nm and 15 nm.

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Figure 5

The calculated modulation transfer functions of the microscope with two different zone plates.

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