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Semiconductors

An eye for impurity

Nature volume 416, pages 799–801 (2002)Cite this article

As electronic devices become smaller, so the challenge of maintaining their electrical properties grows. Identifying the positions of introduced impurities in a semiconductor crystal is a major first step.

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Figure 1: The electron probe of a scanning transmission electron microscope propagates along a column of silicon atoms in the semiconductor lattice.

P. M. VOYLES

References

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  1. the College of Engineering, University of Wisconsin, 1415 Engineering Drive, Madison, 53706-1691, Wisconsin, USA

    Paul S. Peercy

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  1. Paul S. Peercy
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Correspondence to Paul S. Peercy.

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Peercy, P. An eye for impurity. Nature 416, 799–801 (2002). https://doi.org/10.1038/416799a

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