Figures and Tables

From the following article:

Smart single-chip gas sensor microsystem

C. Hagleitner, A. Hierlemann, D. Lange, A. Kummer, N. Kerness, O. Brand and H. Baltes

Nature 414, 293-296(15 November 2001)

doi:10.1038/35104535

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Figure 1 - Unfortunately we are unable to provide accessible alternative text for this. If you require assistance to access this image, or to obtain a text description, please contact npg@nature.com

Figure 1

Principles of three different types of transducer.

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Figure 2

Diagram of the overall microsystem architecture.

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Figure 3

Micrograph of the gas microsensor system chip (size, 7 times 7 mm).

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Figure 4

Sensor signals simultaneously recorded from all three polymer-coated (poly(etherurethane), PEUT) transducers.

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