An all-optical chip-based method has been used to actuate and detect the motion of silicon nanocantilevers. Multiplexed read-out has also been demonstrated.
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Freeman, M., Hiebert, W. Gradient force shows its potential. Nature Nanotech 4, 344–345 (2009). https://doi.org/10.1038/nnano.2009.132
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DOI: https://doi.org/10.1038/nnano.2009.132
