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Thermoelectric microdevice fabricated by a MEMS-like electrochemical process

Nature Materials volume 2, pages 528–531 (2003)Cite this article

Abstract

Microelectromechanical systems (MEMS) are the basis of many rapidly growing technologies, because they combine miniature sensors and actuators with communications and electronics at low cost. Commercial MEMS fabrication processes are limited to silicon-based materials or two-dimensional structures. Here we show an inexpensive, electrochemical technique to build MEMS-like structures that contain several different metals and semiconductors with three-dimensional bridging structures. We demonstrate this technique by building a working microthermoelectric device. Using repeated exposure and development of multiple photoresist layers, several different metals and thermoelectric materials are fabricated in a three-dimensional structure. A device containing 126 n-type and p-type (Bi, Sb)2Te3 thermoelectric elements, 20 μm tall and 60 μm in diameter with bridging metal interconnects, was fabricated and cooling demonstrated. Such a device should be of technological importance for precise thermal control when operating as a cooler, and for portable power when operating as a micro power generator.

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Figure 1: A typical thermoelectric device.
Figure 2: Electrochemical MEMS fabrication steps for thermoelectric microdevice.
Figure 3: Split-screen thermal image of a thermoelectric microdevice functioning as a cooler.
Figure 4

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Acknowledgements

This work is supported by the US Defense Advanced Research Projects Agency and the Office of Naval Research. This work was carried out at the Jet Propulsion Laboratory, California Institute of Technology, under contract with the National Aeronautics and Space Administration.

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Authors and Affiliations

  1. Jet Propulsion Laboratory/California Institute of Technology, 4800 Oak Grove Drive, Pasadena, 91109, California, USA

    G. Jeffrey Snyder, James R. Lim, Chen-Kuo Huang & Jean-Pierre Fleurial

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  1. G. Jeffrey Snyder
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  4. Jean-Pierre Fleurial
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Correspondence to G. Jeffrey Snyder.

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Snyder, G., Lim, J., Huang, CK. et al. Thermoelectric microdevice fabricated by a MEMS-like electrochemical process. Nature Mater 2, 528–531 (2003). https://doi.org/10.1038/nmat943

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