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Freely suspended nanocomposite membranes as highly sensitive sensors

Nature Materials volume 3, pages 721–728 (2004)Cite this article

Abstract

Highly sensitive sensor arrays are in high demand for prospective applications in remote sensing and imaging. Measuring microscopic deflections of compliant micromembranes and cantilevers is developing into one of the most versatile approaches for thermal, acoustic and chemical sensing. Here, we report on an innovative fabrication of compliant nanocomposite membranes with nanoscale thickness showing extraordinary sensitivity and dynamic range, which makes them candidates for a new generation of membrane-based sensor arrays. These nanomembranes with a thickness of 25–70 nm, which can be freely suspended over large (hundred micrometres) openings are fabricated with molecular precision by time-efficient, spin-assisted layer-by-layer assembly. They are designed as multilayered molecular composites made of a combination of polymeric monolayers and a metal nanoparticle intralayer. We demonstrate that these nanocomposite membranes possess unparalleled sensitivity and a unique autorecovering ability. The membrane nanostructure that is responsible for these outstanding properties combines multilayered polymer/nanoparticle organization, high polymer-chain orientation, and a pre-stretched state.

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Figure 1: A model of microstructure of the nanocomposite membrane with a gold nanoparticle central layer sandwiched between three polymer bilayers.
Figure 2: Characterizations of freely suspended nanocomposite membrane containing gold nanoparticles.
Figure 3: Bulging test of the 600 μm freely suspended nanocomposite membrane monitored by its interference pattern.
Figure 4: Mechanical testing of membranes.
Figure 5: Pressure–temperature sensitivity of freely suspended 9G9 membrane of 600 μm diameter in comparison with a silicon membrane of the same diameter.
Figure 6: Autorecovery of the freely suspended 9G9 membrane subjected to high pressure and long loading time.

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Acknowledgements

This work was supported by the National Science Foundation, CTS-0210005 Grant and the Air Force Office of Science Research, F496200210205 Contract. The authors thank X. Tan and A. Bastawros, Iowa State University and M. R. Beggley, University of Virginia for valuable discussion, F. Laabs and M. Kramer, the Department of Energy Ames Laboratory for access to TEM and assistance with TEM studies, and B. Rybak for assistance with SEM studies.

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  1. Department of Materials Science and Engineering, Iowa State University, Ames, 50011, Iowa, USA

    Chaoyang Jiang, Sergiy Markutsya, Yuri Pikus & Vladimir V. Tsukruk

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  1. Chaoyang Jiang
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Correspondence to Vladimir V. Tsukruk.

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Jiang, C., Markutsya, S., Pikus, Y. et al. Freely suspended nanocomposite membranes as highly sensitive sensors. Nature Mater 3, 721–728 (2004). https://doi.org/10.1038/nmat1212

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