Skip to main content

Thank you for visiting nature.com. You are using a browser version with limited support for CSS. To obtain the best experience, we recommend you use a more up to date browser (or turn off compatibility mode in Internet Explorer). In the meantime, to ensure continued support, we are displaying the site without styles and JavaScript.

  • News & Views
  • Published:

TWO-DIMENSIONAL MATERIALS

Scaled dielectrics for scaled devices

Ultrathin calcium fluoride layers can provide an effective gate dielectric for two-dimensional transistors.

This is a preview of subscription content, access via your institution

Access options

Buy this article

Prices may be subject to local taxes which are calculated during checkout

Fig. 1: Ultrathin CaF2 gate dielectrics for 2D devices.

References

  1. Smith, T. III, Phillips, J., Augustyniak, W. & Stiles, P. Appl. Phys. Lett. 45, 907–909 (1984).

    Article  Google Scholar 

  2. Illarionov, Y. Y. et al. Nat. Electron. https://doi.org/10.1038/s41928-019-0256-8 (2019).

  3. Desai, S. B. et al. Science 354, 99–102 (2016).

    Article  Google Scholar 

  4. Roy, T. et al. ACS Nano 9, 2071–2079 (2015).

    Article  Google Scholar 

  5. Kim, S. et al. Appl. Phys. Lett. 94, 062107 (2009).

    Article  Google Scholar 

  6. Fallahazad, B., Kim, S., Colombo, L. & Tutuc, E. Appl. Phys. Lett. 97, 123105 (2010).

    Article  Google Scholar 

  7. Alaboson, J. M. P. et al. ACS Nano 5, 5223–5232 (2011).

    Article  Google Scholar 

  8. Park, J. H. et al. ACS Nano 10, 6888–6896 (2016).

    Article  Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Corresponding author

Correspondence to Tania Roy.

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Roy, T. Scaled dielectrics for scaled devices. Nat Electron 2, 213–214 (2019). https://doi.org/10.1038/s41928-019-0261-y

Download citation

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1038/s41928-019-0261-y

Search

Quick links

Nature Briefing

Sign up for the Nature Briefing newsletter — what matters in science, free to your inbox daily.

Get the most important science stories of the day, free in your inbox. Sign up for Nature Briefing