Abstract
The growth of III–V semiconductors on silicon would allow the integration of their superior (opto-)electronic properties1,2,3 with silicon technology. But fundamental issues such as lattice and thermal expansion mismatch and the formation of antiphase domains have prevented the epitaxial integration of III–V with group IV semiconductors4,5,6. Here we demonstrate the principle of epitaxial growth of III–V nanowires on a group IV substrate. We have grown InP nanowires on germanium substrates by a vapour–liquid–solid7 method. Although the crystal lattice mismatch is large (3.7%), the as-grown wires are monocrystalline and virtually free of dislocations. X-ray diffraction unambiguously demonstrates the heteroepitaxial growth of the nanowires. In addition, we show that a low-resistance electrical contact can be obtained between the wires and the substrate.
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References
Berg, A.A. & Dean, P.J. Light-Emitting Diodes (Clarendon, Oxford, 1976).
Nguyen, L.D., Larson, L.E. & Mishra, U.K. Ultra-high speed modulation-doped field-effect transistor. A tutorial review. Proc. IEEE 80, 494–518 (1992).
Eisenbeiser, K., Huang, J.-H., Salih, A., Hadizad, P. & Pitts, B. Manufacturable GaAs VFET for power switching applications. IEEE Elec. Dev. Lett. 21, 144–145 (2000).
Krost, A., Heinrichsdorf, F. & Bimberg, D. InP on Si(111): Accomodation of lattice mismatch and structural properties. Appl. Phys. Lett. 64, 769–771 (1994).
Carlin, J.A., Ringel, S.A., Fitzgerald, E.A., Bulsara, M. & Keyes, B.M. Impact of GaAs buffer thickness on electronic quality of GaAs grown on graded Ge/GeSi/Si substrates. Appl. Phys. Lett. 76, 1884–1886 (2000).
Shichijo, H., Matyi, R., Taddiken, A.H. & Kao, Y.C. Monolithic integration for co-integration of GaAs MESFET and silicon CMOS devices and circuits. Trans. IEEE Elec. Dev. 37, 548–555 (1990).
Wagner, R.S. & Ellis, W.C. Vapor–liquid–solid mechanism of single crystal growth. Appl. Phys. Lett. 4, 89–90 (1964).
Bjrk, M.T. et al. One-dimensional heterostructures in semiconductor nanowhiskers. Appl. Phys. Lett. 80, 1058–1060 (2002).
Wu, Y., Fan, R. & Yang, P. Block-by-block growth of single-crystalline Si/SiGe superlattice nanowires. Nano Lett. 2, 83–86 (2002).
Ertekin, E., Greaney, P.A., Sands, T.D. & Chrzan, D.C. Equilibrium analysis of lattice-mismatched nanowire heterostructures. Mater. Res. Soc. Symp. Proc. 737, F10.4.1–6 (2003).
Zervos, M. & Feiner, L.F. Electronic structure of piezoelectric double-barrier InAs/InP/InAs/InP/InAs (111) nanowires. J. Appl. Phys. 95, 281–291 (2004).
Givargizov, E.I. Periodic instability in whisker growth. J. Cryst. Growth 20, 217–226 (1973).
Givargizov, E.I. Fundamental aspects of VLS growth. J. Cryst. Growth 31, 20–30 (1975).
Hiruma, K. et al. Growth and optical properties of nanometer-scale GaAs and InAs whiskers. J. Appl. Phys. 77, 447–462 (1995).
Kamins, T.I., Li, X., Williams, R.S. & Liu, X. Growth and structure of chemically vapor deposited Ge nanowires on Si substrates. Nano Lett. 4, 503–506 (2004).
Zhong, Z., Qian, F., Wang, D. & Lieber, C.M. Synthesis of p-type gallium nitride nanowires for electronic and photonic nanodevices. Nano Lett. 3, 343–346 (2003).
Huang, M.H. et al. Room-temperature ultraviolet nanowire nanolasers. Science 292, 1897–1899 (2001).
Bakkers, E.P.A.M. & Verheijen, M.A. Synthesis of InP nanotubes. J. Am. Chem. Soc. 125, 3440–3441 (2003).
Lide, D.R. (ed.) Handbook of Chemistry and Physics (CRC, Boca Raton, 1995).
Horn-von Hoegen, M., LeGoues, F.K., Copel, M., Reuter, M.C. & Tromp, R.M. Defect self-annihilation in surfactant-mediated epitaxial growth. Phys. Rev. Lett. 67, 1130–1133 (1991).
Wong, H.S.P. Beyond the conventional transistor. IBM J. Res. Dev. 46, 133–167 (2002).
Ruan, Y.C. & Ching, W.Y. An effective dipole theory for band lineups in semiconductor heterojunctions. J. Appl. Phys. 62, 2885–2897 (1987).
Yu, K.M., Moll, A.J. & Walukiewicz, W. Amphoteric behavior and precipitation of Ge dopants in InP. J. Appl. Phys. 80, 4907–4915 (1996).
Krinhj, P., Hansen, J.L. & Shiryaev, S.Y. Structural and electrical characteristics of Ge and Se implanted InP after thermal annealing. J. Appl. Phys. 72, 2249–2255 (1992).
Sakai, A., Tatsumi, T. & Aoyama, K. Growth of strain-relaxed Ge films on Si(001) surfaces. Appl. Phys. Lett. 71, 3510–3512 (1997).
Duan, X. & Lieber, C.M. General synthesis of compound semiconductor nanowires. Adv. Mater. 12, 298–302 (2000).
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Bakkers, E., van Dam, J., De Franceschi, S. et al. Epitaxial growth of InP nanowires on germanium. Nature Mater 3, 769–773 (2004). https://doi.org/10.1038/nmat1235
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DOI: https://doi.org/10.1038/nmat1235
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