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Finer features for functional microdevices

Nature volume 412, pages 697–698 (2001)Cite this article

Micromachines can be created with higher resolution using two-photon absorption.

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Figure 1: Microfabrication and nanofabrication at subdiffraction-limit resolution.
Figure 2: Functional micro-oscillator system, in which not only the spring but also the cubic anchor and the bead were produced using our two-photon absorption system.

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Authors and Affiliations

  1. Department of Applied Physics, Osaka University, Suita, 565-0871, Osaka, Japan

    Satoshi Kawata, Hong-Bo Sun, Tomokazu Tanaka & Kenji Takada

Authors
  1. Satoshi Kawata
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  2. Hong-Bo Sun
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  3. Tomokazu Tanaka
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  4. Kenji Takada
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Correspondence to Satoshi Kawata.

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Kawata, S., Sun, HB., Tanaka, T. et al. Finer features for functional microdevices. Nature 412, 697–698 (2001). https://doi.org/10.1038/35089130

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